National Toxicology Program

National Toxicology Program

Testing Status of Hexamethyldisilazane - M882480


CASRN: 999-97-3

Formula: C6-H19-N-Si2

Synonyms/Common Names

  • Hexamethyl disilizane
  • HMDS

Known Uses

Chemical intermediate, chromatographic packings, semiconductor industry

Chemical Properties

Toxicity Effects (HSDB)

Genetic Toxicology

  • In Vitro Cytogenetics (CA/SCE)  (A81034)  Completed 
    • Sister Chromatid Exchange Not Tested 
    • Chromosome Aberrations Negative 
  • Salmonella  (A99835)  Completed 
    •  Negative 
NTP is located at the National Institute of Environmental Health Sciences, part of the National Institutes of Health.